The roots-type pump is a vacuum pump without internal compression. Usually, the compression ratio is very low, so the high and medium vacuum pumps need the foreline pump. The ultimate vacuum of the Roots pump depends on the structure and manufacturing accuracy of the pump itself and on the ultimate vacuum of the foreline pump. In order to increase the ultimate vacuum of the pump, the Roots pump can be used in series. The Roots pump works like a Roots blower. Due to the continuous rotation of the rotor, the pumped gas is sucked from the intake port into the space v0 between the rotor and the pump casing, and then discharged through the exhaust port. Since the v0 space is fully closed after inhalation, the gas is not compressed and expanded in the pump chamber. However, when the top of the rotor turns over the edge of the exhaust port and the v0 space communicates with the exhaust side, since the gas pressure on the exhaust side is high, a part of the gas is returned to the space v0, so that the gas pressure suddenly increases. When the rotor continues to rotate, the gas exits the pump. The Roots pump is in the pump chamber, and two "8"-shaped rotors are mounted perpendicularly to each other on a pair of parallel shafts, and a pair of gear belts having a transmission ratio of 1 are operated in opposite synchronous rotational motions. Between the rotors, there is a certain gap between the rotor and the inner wall of the pump casing to achieve high speed operation.
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